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Centrotherm Gas Fume Scrubber

Used / Second Hand

Sold As Seen Price [?]
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In stock now
From a working environment, Excellent Condition
Stock No
FLM E300K3 - HT
Year of Manufacture
From a working environment, Excellent Condition
Other Info
Wet Scrubber
Our Central Warehouse, Aldridge, UK
Weight (kgs)
External Dimensions (WxDxH mm) [?]
800 x 620 x 1850
Your delivery options


Centrotherm FLM Waste Gas Abatement System cleaning waste gas via burning, wet scrubbing and aerosol retention.


Gases requiring disposal are created in chemical processes from source substances that have been fed into a connected process tool of the semiconductor or comparable industry. These gases are fed into the gas treatment system as waste gas and are cleaned via burning, wet scrubbing and aerosol retention. The cleaned gas, which is fed into the exhaust system, is designated clean gas.

Exceptions are inert gases such as nitrogen, argon and helium when used as carriers, dilution or purging gases for vacuum pumps. 


The gases requiring disposal are called waste gas in the operating manual and depending on the type of system they are fed into a natural gas/ oxygen flame (E...K...), propane/ oxygen flame (P...K...) or hydrogen/ oxygen flame (H...K...) with excess oxygen. At a temperature of over 1000 °C, the reaction products and process gases remaining in the waste gas are either burned or thermally split and converted into products that can be wet scrubbed.

Wet Scrubbing

The waste gases are led to a two-stage wet scrubber after leaving the burning chamber. Components that are soluble or react with the washing liquid are wet scrubbed and neutralized. Dust particles are retained from the waste gas and are removed with the washing liquid. At the same time, the waste gas is cooled down to a temperature below 50 °C in the wet scrubber.

Aerosol Elimination

A demister located between the two scrubber stages and a highly effective aerosol filter located at the cleaned gas outlet of the system prevents solid matter or liquid particles from moving into the exhaust system.


  • Gas indicator with remote measuring head
  • Media supply level 
  • Clean gas output 
  • Eyebolt as transport aid 
  • System door with lock 
  • Ventilation
  • Adjusting foot
  • Door with control module
  • Emergency-off push button
  • Main switch
  • Touch panel
  • Reactor
  • Burner
  • Gas formation plate
  • Combustion chamber
  • Movable funnel with funnel slide for lowering the combustion chamber
  • Threaded elbow joint to secure the system in earthquake regions
  • Wastewater depletion pump
  • Washing liquid tank with cooling system
  • Drain spigot of washing liquid tank
  • Cleansing hole cover handle of washing liquid tank
  • Washing liquid pump
  • Door interlocking with electrical lock
  • Door with control module
  • Burner control module
  •  3-way valve
  • Waste gas supply for waste gas inlet x 4

Functional Description

The schematic diagram shows a system with four waste gas supply lines. Depending on the type, the system can be equipped with 1, 2, 3, or 4 waste gas supply lines (K1 to K4). The waste gases of up to 4 different processes are fed into the burner independently via the three-way valves and exposed to the flame. The length of the combustion chamber determines the corresponding dwell time.

The formation of a counter-current is forced by the exhaust system between the combustion chamber and the external pipe of the reactor. Wet scrubbing, neutralization, and cooling of the waste gas components converted in the flame are carried out in this counter-current. The last treatment stage retains solid and fluid particles before the cleaned gas is fed into the exhaust system.

Safety Concept

Toxic, corrosive, self-inflammable, combustible, and environment-relevant waste gases are fed into the system. Burning gases are used for the operation of the system. The implemented safety concept minimizes the resulting hazards for personnel and systems. At the same time, the reliable operation of the system is ensured.

Safety-relevant Aspects of the Mechanical Construction

  • The system has a closed housing.
  • For service and preventive maintenance works the system can be accessed from one side only, the front and operating side.
  • The control cabinet is closed tightly. Thus, the electrical components and the control system are separated from other media-carrying assemblies.
  • The system is EMC-tested.
  • All lines for waste and burning gases have been tested for leaks.
  • The waste gases are conducted in stainless steel pipes with KF connections into the burner and via the bypasses.
  • The burning gases are conducted in stainless steel pipes with cutting ring screw joints.
  • The reactor is made of stainless steel. The individual reactor assemblies are interconnected via quick-lock couplings. These are sealed by 0-rings.
  • The burning chamber is protected by a double-wall reactor.
  • The reactor outside wall is cooled by the washing liquid conducted through the washing liquid circulation system.
  • The system bottom is equipped with a secondary containment that avoids leaking of the washing liquid in case of a leakage at the washing liquid tank.
  • A low pressure, which is monitored, is built up within the reactor. Thus, safe waste gas conduction is ensured.
  • All assemblies and components are arranged according to preventive maintenance and service frequency within the system. The higher the frequency, the better the accessibility.
  • The EMERGENCY STOP push button is located on the system's operating panel. This guarantees quick and safe disconnection of the system from the voltage supply.

pdf icon Print / Download Centrotherm Gas Fume Scrubber Datasheet

Additional files

FLM Waste Gas Abatement System

Photographs taken prior refurbishment. Our refurbishment service is not available on all machines.